B1517A (X4) - Plaub HRSMU - Txog 100V, 100mA zog, 1fA kev daws teeb meem tam sim no
B1520A - MFCMU - 1kHz txog 5MHz, nce txog 100V DC bias nrog SMU GET QUg-12
B1517A (X4) - Plaub HRSMU - Txog 100V, 100mA zog, 1fA kev daws teeb meem tam sim no
B1530A - WGFMU - Min 100ns mem tes qhov dav, 10V lub ncov-rau-siab tshaj plaws cov zis, 5ns tam sim no lossis ntsuas ntsuas qhov ntsuas ntsuas QUETE
Khoom Ncurwm
Lub Keysight B1500A (Txheeb Ze) Semiconductor Ntaus Khoom Txheeb Xyuas Khoom Siv yog cov qauv ntsuas uas muaj kaum qhov kev teeb tsa uas pab txhawb rau ob qho kev ntsuas IV thiab CV thiab tseem ceev cov hluav taws xob high-voltage pulsing. Nws paub, Microsoft ® Windows ® tus neeg siv interface txhawb nqa Agilent's EasyEXPERT software, uas muab cov kev ua haujlwm tshiab, kev paub siv ua haujlwm rau kev ntaus cim ua cim. Vim tias nws tsis tshua muaj hluav taws xob tsawg, tam sim no, siv hluav taws xob tsawg, thiab kev sib xyaw nrog lub peev xwm ntsuas, Lub Keysight B1500A (Agilent) tuaj yeem siv rau ntau qhov ntawm cov khoom siv hluav taws xob (semiconductor device characterization) xav tau (IC-CAP txhawb B1500A). Nws tseem yog cov tshuaj zoo heev rau tsis-hloov pauv ntawm lub cim xeeb ntawm lub cev thiab lub siab ceev ntaus cim (nrog rau kev ntsuas siab NBTI).
Nta thiab cov txiaj ntsig ntawm:
● Superior IV ntsuas kev ua tau zoo: 0.1 fA / 0.5 µV ntsuas kev ntsuas
Features Kev ntsuas cov qauv muaj xws li ib qho thiab ntau cov channel cheb, lub sijhawm ntsuas, sau cov cheb, nomi CV-zoo li qub (siv cov SMUs), kev tswj ncaj qha thiab kev ncaj ncees linear waveform tiam (ALWG) GUI rau HV-SPGUs.
● Xaiv yeem, cov khoom siv sib xyaw ua ke muaj kev txhawb nqa CV ntsuas txog 5 MHz
● Yeem xaiv txoj haujlwm raws li CV-IV hloov cov kev daws teeb meem muaj 0.5 µV voltage ntsuas kev daws teeb meem thiab 10 fA, 1 fA lossis 0.1 fA ntsuas ntsuas tam sim no muaj peev xwm
● Kev sim ua haujlwm tau yooj yim nrog cov pib ua semiautomatic wafer prober tsav tsheb thiab sim ua ntu zus yam tsis muaj lub phiaj xwm los ntawm Quick Test hom
● Xaiv yeem high-voltage semiconductor pulse generator chav tsev (HV-SPGU) muaj nrog 10 ns programmable mem tes qhov dav thiab + / - 40 V (80 V ncov-rau-ncov) cov zis.
● Yeem ntsuas lub tshuab hluav taws xob / cov ntsuas ntsuas ntsuas nrawm (WGFMU) muaj nrog ALWG thiab nrawm tam sim no lossis ntsuas hluav taws xob ntsuas muaj peev xwm.
● 10 ns pulsed IV daws yog muaj nyob rau cov yam ntxwv high-k rooj vag dielectric thiab SOI (silicon-on-insulator) transistors.
Classic Kev Tshawb Fawb Ua Qauv yog muaj los muab qhov zoo, zoo li thiab cov lus siv ntawm 4155/4156 interface thaum txhim kho cov neeg siv kev sib cuam tshuam los ntawm kev siv tag nrho ntawm Microsoft ® Windows ® GUI nta.
Cov ntsiab lus tseem ceeb ntawm:
Features Cov Cim Nta
Instrument Cuab yeej siv PC nrog Windows ® XP Professional OS
Ib leeg-kem daws teeb meem rau tam sim no-voltage (IV), capacitance-voltage (CV), lub cim mem tes, lub vas nthiv IV, thiab ntsuas lub sijhawm ntsuas.
● Kaum tus qauv looj rau cov ntsuas saib (SMUs) thiab lwm hom module (MFCMU, HV-SPGU thiab WGFMU) *
Data Offline cov ntaub ntawv txheeb xyuas thiab thov kuaj kev txhim kho ntawm Desktop EasyEXPERT software
Kev Ntsuas Muaj Peev Xwm
Txhawb kev ntsuas tam sim no-voltage (IV) rau 0.1fA thiab 0.5µV
Txhawb ob qho tib si-zoo li qub thiab nruab nrab qhov nruab nrab-qhov ntsuas hluav taws xob (CV) kev ntsuas]
■ Txhawb kev ntsuas qhov tseeb ceev IV thiab lub sijhawm ntsuas tus ntsuas rau ntau qhov siv xws li ntsuas pulsed IV, NBTI thiab RTS ntsuas.
■ Txhawb cov hluav taws xob high pulse tiam (txog ± 40 V) rau lub zog siab thiab cov cuab yeej ntsuas hluav taws xob.
Qhia Txog Kev Xaiv Module:
| Module Main | Lub Qhov | Specification |
B1510A HPSMU | 2 | Txog 200V, 1A quab yuam. 10fA tam sim no kev daws teeb meem |
B1511A MPSMU | 1 | Txog li 100V, 100mA quab yuam, 10fA kev daws teeb meem tam sim no |
B1517A HRSMU | 1 | Txog li 100V, 100mA quab yuam, 1fA kev daws teeb meem tam sim no |
E5288A ASU | NA | Txog li 100V, 100mA quab yuam, 100aA kev daws teeb meem tam sim no |
B1520A MFCMU | 1 | 1kHz txog 5MHz, mus txog 100V DC kev tsis ncaj ncees nrog SMU |
B1525A HV-SPGU | 1 | Min 12.5ns mem tes dav dav, 10ns hloov sijhawm, nce mus txog 40V nrog 3 qib pu |
B1530A WGFMU | 1 | Min 100ns mem tes dav, 10V ncov-rau-siab kawg tsim tawm, 5ns tam sim no lossis voltage ntsuas qhov ntsuas nrawm |
Cim npe nrov: siv cov khoom lag luam semiconductor device analyzer agilen b1500a, Tuam Tshoj, tuam ntxhab, lwm tus neeg, Lub Hoobkas, yuav, tus nqi qis, hauv Tshuag






